About ICMTek
Technology

Contact us

ICMTek's products are built on Fiber Bragg Grating (FBG) technology — a proven fiber optic sensing platform commercialized across medical, aerospace, and energy industries for decades. FBG sensors are highly accurate, stable, and immune to electromagnetic interference from RF and microwave sources. A single optical fiber can carry up to 100 sensing points, enabling multipoint temperature, strain, and acceleration measurements at a fraction of the cost and complexity of conventional wired sensor arrays. ICMTek brings this technology to semiconductor manufacturing with high-performance interrogators, embedded sensor wafers, and custom probe solutions — all supported by embedded data analytics and a web-based user interface ready for smart manufacturing environments.

Our principles

Multipoint FBG Sensing

Up to 100 sensing points on a single optical fiber with ±1 pm accuracy and 0.5 pm resolution — delivering data density that conventional thermocouple arrays cannot match.

EMI Immunity & Harsh Environments

Passive optical sensors require no electrical power and are immune to RF, microwave, and plasma interference. Proven stability from −100°C to over 1000°C in chemically harsh environments.

AI-Driven Analytics

Embedded machine learning continuously builds acoustic and thermal signature libraries, enabling automated fault detection, chamber matching, and predictive maintenance at the fab level.

Standard Product Portfolio

ICM-1000

FBG Interrogator

  • 4 to 16 channels (1 FBG fiber per channel)
  • Up to 100 sensors per channel
  • Accuracy / stability: ±1 pm; Resolution: 0.5 pm
  • Self-calibrating internal wavelength reference
  • Data output rate: 100 Hz per channel
  • Communication: Ethernet 1 Gbps
  • Embedded data analytics & web-based UI
  • Smart manufacturing ready
ICMW-100

FBG Temperature Monitor Wafer

  • 200 mm or 300 mm silicon monitor wafer
  • Wafer thickness: 750 µm
  • 1 to 100 embedded FBG sensing points
  • Temperature range: −20°C to 300°C
  • Accuracy: ±1°C typical; Resolution: 0.1°C
  • Immune to EMI (RF / microwave sources)
  • Vacuum-compatible feedthrough options (under lid, KF fitting)
  • Proprietary strain-decoupled sensor attachment
FTP Series

FBG Temperature Probe

  • 1 to 50 gratings per probe
  • Temperature range: −20°C to 650°C
  • Accuracy: ±1°C or better
  • Protective tube options: stainless steel, PEEK, ceramic
  • Measures solid, liquid, or gas temperature
  • Suitable for in-situ long-term deployment